SDLE Research Center Publications | Case School of Engineering

Thursday, August 1, 2002

Fluoropolymers for 157 nm Lithography: Performance of Single Layer Resists.

French, R. H. (2002). Fluoropolymers for 157 nm Lithography: Performance of Single Layer Resists.. Journal of Photopolymer Science and Technology, 15 , 677–687.

Tuesday, July 30, 2002

157-nm pellicles: polymer design for transparency and lifetime

French, R. H., Wheland, R. H., Qiu, W. H., Lemon, M. H., Blackman, G. H., Zhang, X. H., Gordon, J. H., Liberman, V. H., Grenville, A. H., Kunz, R. H., & Rothschild, M. H. (2002). 157-nm pellicles: polymer design for transparency and lifetime. Proceedings of SPIE.

Tuesday, July 30, 2002

Behavior of candidate organic pellicle materials under 157-nm laser irradiation

Grenville, A., Liberman, V., Rothschild, M., Sedlacek, J., French, R. H., Wheland, R. H., Zhang, X. H., & Gordan, J. H. (2002). Behavior of candidate organic pellicle materials under 157-nm laser irradiation. Proceedings of SPIE.

Tuesday, January 1, 2002

Diffusion of Oxygen in CdSe-Photosensor Arrays

Klement, U., Ernst, F., Baretzky, B., & Plitzko, J. (2002). Diffusion of Oxygen in CdSe-Photosensor Arrays. Materials Science and Engineering B, 94 , 123–130.

Tuesday, January 1, 2002

Fabrication of Cu-Induced Networks of Linear Nanostructures on Different Length Scales

Adelung, R., Hartung, W., & Ernst, F. (2002). Fabrication of Cu-Induced Networks of Linear Nanostructures on Different Length Scales. Acta Materialia, 50 , 4925–4933.

Tuesday, January 1, 2002

Laterally Aligned Ge/Si Islands: A New Concept for Faster Field-Effect Transistors

Schmidt, O., Denker, U., Dashiell, M., Jin, N., Phillipp, F., Eberl, K., Schreiner, R., Gräbeldinger, H., Schweizer, H., Christiansen, S., & Ernst, F. (2002). Laterally Aligned Ge/Si Islands: A New Concept for Faster Field-Effect Transistors. Materials Science and Engineering B, 89 , 101–105.

Tuesday, January 1, 2002

Assessing the Mechanical Strength of Interfacial Atomic Bonds by Quantitative HRTEM

Ernst, F. (2002). Assessing the Mechanical Strength of Interfacial Atomic Bonds by Quantitative HRTEM. Philosophical Magazine A, 82 , 2677–2693.

Tuesday, January 1, 2002

Epitaxial Electrodeposition of a Crystalline Metal Oxide onto Single-Crystalline Silicon

Switzer, J., Liu, R., Bohannan, E., & Ernst, F. (2002). Epitaxial Electrodeposition of a Crystalline Metal Oxide onto Single-Crystalline Silicon. The Journal of Physical Chemistry B, 106 , 12369–12372.

Tuesday, January 1, 2002

High-Resolution Imaging and Spectrometry of Materials

Ernst, F., & Rühle, M. (2002). High-Resolution Imaging and Spectrometry of Materials. Springer Verlag.

Tuesday, January 1, 2002

Microcharacterisation of Materials

Ernst, F., & Sigle, W. (2002). Microcharacterisation of Materials. Springer Verlag.

Tuesday, January 1, 2002

Composition of Self-Assembled Ge/Si Islands in Single and Multiple Layers

Schmidt, O., Denker, U., Christiansen, S., & Ernst, F. (2002). Composition of Self-Assembled Ge/Si Islands in Single and Multiple Layers. Applied Physics Letters, 14 , 2614–2616.

Tuesday, January 1, 2002

Epitaxy of Ge on Sapphire

Poulat, S., & Ernst, F. (2002). Epitaxy of Ge on Sapphire. Materials Science and Engineering A, 323 , 9–16.

Tuesday, January 1, 2002

Ion Exchange at a Metal/Ceramic Interface

Nataraj, R., Saha, A., An, L., Hasselman, D., & Ernst, F. (2002). Ion Exchange at a Metal/Ceramic Interface. Acta Materialia, 50 , 1165–1176.

Tuesday, January 1, 2002

Self-Assembled Nanowire Networks by Deposition of Copper onto Layered-Crystal Surfaces

Adelung, R., Ernst, F., Scott, A., Tabib-Azar, M., Kipp, L., Skibowski, M., Hollensteier, S., Spiecker, E., Jäger, W., Zaporojtchenko, V., & Faupel, F. (2002). Self-Assembled Nanowire Networks by Deposition of Copper onto Layered-Crystal Surfaces. Advanced Materials, 14 , 1056–1061.

Tuesday, December 25, 2001

Quantitative analysis of valence electron energy-loss spectra of aluminium nitride

French, R. H. (2001). Quantitative analysis of valence electron energy-loss spectra of aluminium nitride. Journal of Microscopy, 191 (3), 286-296.

Saturday, December 15, 2001

Bulk electronic structure of {SrTiO[sub} 3]: Experiment and theory

French, R. H. (2001). Bulk electronic structure of {SrTiO[sub} 3]: Experiment and theory. Journal of Applied Physics, 90 , 6156.

Saturday, December 1, 2001

Nano Metallic Solid Electrolyte Switches and Cu Nanowire Interconnects for Molecular Electronics

Tabib-Azar, M., Scott, A., Adelung, R., & Ernst, F. (2001). Nano Metallic Solid Electrolyte Switches and Cu Nanowire Interconnects for Molecular Electronics. .

Tuesday, September 4, 2001

Materials design and development of fluoropolymers for use as pellicles in 157-nm photolithography

French, R. H., Gordon, J. H., Jones, D. H., Wheland, R. H., Zhang, X. H., Zumsteg, F. H., Sharp, K. H., & Qiu, W. H. (2001). Materials design and development of fluoropolymers for use as pellicles in 157-nm photolithography. Proc. SPIE 4346.

Friday, August 24, 2001

157-nm imaging using thick single-layer resists

Crawford, M., Feiring, A., Feldman, J., French, R. H., Petrov, V. H., Schadt, F. H., Smalley, R. H., & Zumsteg Jr. , F. H. (2001). 157-nm imaging using thick single-layer resists. Proceedings of SPIE.

Wednesday, August 1, 2001

Orientation dependence in near-field scattering from {TiO2} particles

French, R. H. (2001). Orientation dependence in near-field scattering from {TiO2} particles. Applied Optics, 40 (22), 3726.

Wednesday, June 6, 2001

Optimizing polymers to increase pellicle lifetime and transmission for 157-nm lithography

French, R. H., Wheland, R. H., Gordon, J. H., & Zhang, W. H. (2001). Optimizing polymers to increase pellicle lifetime and transmission for 157-nm lithography. Micro.

Friday, June 1, 2001

Progress in Materials Development for 157nm Photolithography: Photoresists and Pellicles

French, R. H., & Feldman, J. H. (2001). Progress in Materials Development for 157nm Photolithography: Photoresists and Pellicles. Semiconductor Fabtech.

Thursday, February 1, 2001

Near-field scattering from red pigment particles: Absorption and spectral dependence

French, R. H. (2001). Near-field scattering from red pigment particles: Absorption and spectral dependence. Journal of Applied Physics, 89 , 1898.

Thursday, February 1, 2001

Valence electron energy loss study of Fe-doped {SrTiO3} and a Σ13 boundary: electronic structure and dispersion forces

French, R. H. (2001). Valence electron energy loss study of Fe-doped {SrTiO3} and a Σ13 boundary: electronic structure and dispersion forces. Ultramicroscopy, 86 , 303–318.

Monday, January 1, 2001

Fully Relaxed Si0.7Ge0.3 Buffers Grown on Patterned Silicon Substrates for Hetero-CMOS Transistors

Wöhl, G., Kasper, E., Hackbarth, T., Kibbel, H., Klose, M., & Ernst, F. (2001). Fully Relaxed Si0.7Ge0.3 Buffers Grown on Patterned Silicon Substrates for Hetero-CMOS Transistors. Journal of Materials Science: Materials in Electronics, 12 , 235–240.